Quality Factor of Free In-plane Vibration of a Fully Clamped Rectangular Micro-plate
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Abstract:
Thermo-elastic damping is a significant dissipation mechanism in high quality factor microstructures. In this paper, thermo-elastic damping of the in-plane vibration of fully clamped rectangular micro-plates has been studied. The governing equation of the micro-plate motion and heat conduction equation were derived. Then, The Galerkin method has been used to solve the coupled heat-displacement equations. Eventually, considering the micro-plate of various materials, the effects of geometrical parameters including the length and width of micro-plate and also ambient temperature on the thermo-elastic damping quality factor have been investigated.
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Journal title
volume 31 issue 1
pages 96- 103
publication date 2018-01-01
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